diff --git a/arch/arm64/boot/dts/nuvoton/Makefile b/arch/arm64/boot/dts/nuvoton/Makefile
index a99dab90472a..c11ab4eac9c7 100644
--- a/arch/arm64/boot/dts/nuvoton/Makefile
+++ b/arch/arm64/boot/dts/nuvoton/Makefile
@@ -1,2 +1,4 @@
 # SPDX-License-Identifier: GPL-2.0
 dtb-$(CONFIG_ARCH_NPCM) += nuvoton-npcm845-evb.dtb
+dtb-$(CONFIG_ARCH_NUVOTON) += ma35d1-iot-512m.dtb
+dtb-$(CONFIG_ARCH_NUVOTON) += ma35d1-som-256m.dtb
diff --git a/arch/arm64/boot/dts/nuvoton/ma35d1-iot-512m.dts b/arch/arm64/boot/dts/nuvoton/ma35d1-iot-512m.dts
new file mode 100644
index 000000000000..dffcaef1e6d8
--- /dev/null
+++ b/arch/arm64/boot/dts/nuvoton/ma35d1-iot-512m.dts
@@ -0,0 +1,24 @@
+// SPDX-License-Identifier: GPL-2.0
+/*
+ * Copyright (C) 2023 Nuvoton Technology Corp.
+ * Author: Shan-Chun Hung <schung@nuvoton.com>
+ *         Jacky huang <ychuang3@nuvoton.com>
+ */
+
+/dts-v1/;
+#include "ma35d1.dtsi"
+
+/ {
+	model = "Nuvoton MA35D1-IoT";
+	compatible = "nuvoton,ma35d1-iot", "nuvoton,ma35d1";
+
+	chosen {
+		stdout-path = "serial0:115200n8";
+	};
+
+	mem: memory@80000000 {
+		device_type = "memory";
+		reg = <0x00000000 0x80000000 0 0x20000000>; /* 512M DRAM */
+	};
+};
+
diff --git a/arch/arm64/boot/dts/nuvoton/ma35d1-som-256m.dts b/arch/arm64/boot/dts/nuvoton/ma35d1-som-256m.dts
new file mode 100644
index 000000000000..3e6c3d5469ac
--- /dev/null
+++ b/arch/arm64/boot/dts/nuvoton/ma35d1-som-256m.dts
@@ -0,0 +1,23 @@
+// SPDX-License-Identifier: GPL-2.0
+/*
+ * Copyright (C) 2023 Nuvoton Technology Corp.
+ * Author: Shan-Chun Hung <schung@nuvoton.com>
+ *         Jacky huang <ychuang3@nuvoton.com>
+ */
+
+/dts-v1/;
+#include "ma35d1.dtsi"
+
+/ {
+	model = "Nuvoton MA35D1-SOM";
+	compatible = "nuvoton,ma35d1-som", "nuvoton,ma35d1";
+
+	chosen {
+		stdout-path = "serial0:115200n8";
+	};
+
+	mem: memory@80000000 {
+		device_type = "memory";
+		reg = <0x00000000 0x80000000 0 0x10000000>; /* 256M DRAM */
+	};
+};
diff --git a/arch/arm64/boot/dts/nuvoton/ma35d1.dtsi b/arch/arm64/boot/dts/nuvoton/ma35d1.dtsi
new file mode 100644
index 000000000000..8c855f6b330a
--- /dev/null
+++ b/arch/arm64/boot/dts/nuvoton/ma35d1.dtsi
@@ -0,0 +1,272 @@
+// SPDX-License-Identifier: GPL-2.0
+/*
+ * Copyright (C) 2023 Nuvoton Technology Corp.
+ * Author: Shan-Chun Hung <schung@nuvoton.com>
+ *         Jacky huang <ychuang3@nuvoton.com>
+ */
+
+#include <dt-bindings/interrupt-controller/arm-gic.h>
+#include <dt-bindings/input/input.h>
+#include <dt-bindings/gpio/gpio.h>
+#include <dt-bindings/clock/nuvoton,ma35d1-clk.h>
+#include <dt-bindings/reset/nuvoton,ma35d1-reset.h>
+
+/ {
+	compatible = "nuvoton,ma35d1";
+	interrupt-parent = <&gic>;
+	#address-cells = <2>;
+	#size-cells = <2>;
+
+	aliases {
+		serial0 = &uart0;
+		serial1 = &uart1;
+		serial2 = &uart2;
+		serial3 = &uart3;
+		serial4 = &uart4;
+		serial5 = &uart5;
+		serial6 = &uart6;
+		serial7 = &uart7;
+		serial8 = &uart8;
+		serial9 = &uart9;
+		serial10 = &uart10;
+		serial11 = &uart11;
+		serial12 = &uart12;
+		serial13 = &uart13;
+		serial14 = &uart14;
+		serial15 = &uart15;
+		serial16 = &uart16;
+	};
+
+	chosen {
+		stdout-path = "serial0:115200n8";
+	};
+
+	cpus {
+		#address-cells = <2>;
+		#size-cells = <0>;
+		cpu0: cpu@0 {
+			device_type = "cpu";
+			compatible = "arm,cortex-a35";
+			reg = <0x0 0x0>;
+			enable-method = "psci";
+			next-level-cache = <&L2_0>;
+		};
+		cpu1: cpu@1 {
+			device_type = "cpu";
+			compatible = "arm,cortex-a35";
+			reg = <0x0 0x1>;
+			enable-method = "psci";
+			next-level-cache = <&L2_0>;
+		};
+		L2_0: l2-cache0 {
+			compatible = "cache";
+			cache-level = <2>;
+		};
+	};
+
+	psci {
+		compatible = "arm,psci-0.2";
+		method = "smc";
+	};
+
+	clk_hxt: clock_hxt {
+		compatible = "fixed-clock";
+		#clock-cells = <0>;
+		clock-frequency = <24000000>;
+		clock-output-names = "clk_hxt";
+	};
+
+	timer {
+		compatible = "arm,armv8-timer";
+		interrupts = <GIC_PPI 13 (GIC_CPU_MASK_SIMPLE(4) |
+			      IRQ_TYPE_LEVEL_LOW)>, /* Physical Secure */
+			     <GIC_PPI 14 (GIC_CPU_MASK_SIMPLE(4) |
+			      IRQ_TYPE_LEVEL_LOW)>, /* Physical Non-Secure */
+			     <GIC_PPI 11 (GIC_CPU_MASK_SIMPLE(4) |
+			      IRQ_TYPE_LEVEL_LOW)>, /* Virtual */
+			     <GIC_PPI 10 (GIC_CPU_MASK_SIMPLE(4) |
+			      IRQ_TYPE_LEVEL_LOW)>; /* Hypervisor */
+		clock-frequency = <12000000>;
+		interrupt-parent = <&gic>;
+	};
+
+	sys: system-management@40460000 {
+		compatible = "nuvoton,ma35d1-sys", "syscon", "simple-mfd";
+		reg = <0x0 0x40460000 0x0 0x200>;
+
+		reset: reset-controller {
+			compatible = "nuvoton,ma35d1-reset";
+			regmap = <&sys>;
+			#reset-cells = <1>;
+		};
+	};
+
+	clk: clock-controller@40460200 {
+		compatible = "nuvoton,ma35d1-clk", "syscon";
+		reg = <0x00000000 0x40460200 0x0 0x100>;
+		#clock-cells = <1>;
+		clocks = <&clk_hxt>;
+		clock-names = "clk_hxt";
+		assigned-clocks = <&clk CAPLL>,
+				  <&clk DDRPLL>,
+				  <&clk APLL>,
+				  <&clk EPLL>,
+				  <&clk VPLL>;
+		assigned-clock-rates = <800000000>,
+				       <266000000>,
+				       <180000000>,
+				       <500000000>,
+				       <102000000>;
+		nuvoton,pll-mode = <0>, <1>, <0>, <0>, <0>;
+		nuvoton,sys = <&sys>;
+	};
+
+	gic: interrupt-controller@50801000 {
+		compatible = "arm,gic-400";
+		#interrupt-cells = <3>;
+		interrupt-parent = <&gic>;
+		interrupt-controller;
+		reg =   <0x0 0x50801000 0 0x1000>, /* GICD */
+			<0x0 0x50802000 0 0x2000>, /* GICC */
+			<0x0 0x50804000 0 0x2000>, /* GICH */
+			<0x0 0x50806000 0 0x2000>; /* GICV */
+		interrupts = <GIC_PPI 9 (GIC_CPU_MASK_RAW(0x13) |
+			      IRQ_TYPE_LEVEL_HIGH)>;
+	};
+
+	uart0:serial@40700000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x40700000 0x0 0x100>;
+		interrupts = <GIC_SPI 59 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART0_GATE>;
+		status = "okay";
+	};
+
+	uart1:serial@40710000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x40710000 0x0 0x100>;
+		interrupts = <GIC_SPI 60 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART1_GATE>;
+		status = "disabled";
+	};
+
+	uart2:serial@40720000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x40720000 0x0 0x100>;
+		interrupts = <GIC_SPI 61 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART2_GATE>;
+		status = "disabled";
+	};
+
+	uart3:serial@40730000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x40730000 0x0 0x100>;
+		interrupts = <GIC_SPI 62 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART3_GATE>;
+		status = "disabled";
+	};
+
+	uart4:serial@40740000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x40740000 0x0 0x100>;
+		interrupts = <GIC_SPI 63 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART4_GATE>;
+		status = "disabled";
+	};
+
+	uart5:serial@40750000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x40750000 0x0 0x100>;
+		interrupts = <GIC_SPI 64 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART5_GATE>;
+		status = "disabled";
+	};
+
+	uart6:serial@40760000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x40760000 0x0 0x100>;
+		interrupts = <GIC_SPI 91 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART6_GATE>;
+		status = "disabled";
+	};
+
+	uart7:serial@40770000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x40770000 0x0 0x100>;
+		interrupts = <GIC_SPI 92 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART7_GATE>;
+		status = "disabled";
+	};
+
+	uart8:serial@40780000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x40780000 0x0 0x100>;
+		interrupts = <GIC_SPI 93 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART8_GATE>;
+		status = "disabled";
+	};
+
+	uart9:serial@40790000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x40790000 0x0 0x100>;
+		interrupts = <GIC_SPI 94 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART9_GATE>;
+		status = "disabled";
+	};
+
+	uart10:serial@407a0000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x407a0000 0x0 0x100>;
+		interrupts = <GIC_SPI 95 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART10_GATE>;
+		status = "disabled";
+	};
+
+	uart11:serial@407b0000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x407b0000 0x0 0x100>;
+		interrupts = <GIC_SPI 96 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART11_GATE>;
+		status = "disabled";
+	};
+
+	uart12:serial@407c0000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x407c0000 0x0 0x100>;
+		interrupts = <GIC_SPI 118 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART12_GATE>;
+		status = "disabled";
+	};
+
+	uart13:serial@407d0000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x407d0000 0x0 0x100>;
+		interrupts = <GIC_SPI 119 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART13_GATE>;
+		status = "disabled";
+	};
+
+	uart14:serial@407e0000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x407e0000 0x0 0x100>;
+		interrupts = <GIC_SPI 120 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART14_GATE>;
+		status = "disabled";
+	};
+
+	uart15:serial@407f0000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x407f0000 0x0 0x100>;
+		interrupts = <GIC_SPI 121 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART15_GATE>;
+		status = "disabled";
+	};
+
+	uart16:serial@40880000 {
+		compatible = "nuvoton,ma35d1-uart";
+		reg = <0x0 0x40880000 0x0 0x100>;
+		interrupts = <GIC_SPI 122 IRQ_TYPE_LEVEL_HIGH>;
+		clocks = <&clk UART16_GATE>;
+		status = "disabled";
+	};
+};
